Scheduling Method of Lot Operating Sequence in Semiconductor Fabrication
نویسندگان
چکیده
منابع مشابه
Scheduling Semiconductor Wafer Fabrication
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ژورنال
عنوان ژورنال: Transactions of the Institute of Systems, Control and Information Engineers
سال: 1996
ISSN: 1342-5668,2185-811X
DOI: 10.5687/iscie.9.573